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Effect of Magnetron Sputtering Power on ITO Film Deposition at Room Temperature
Saenko A.V., Vakulov Z.E., Klimin V.S., Bilyk G.E., Malyukov S.P.
A comprehensive study of nonuniformity properties of the LiCoO2 thin-film cathode fabricated by RF sputtering
Kurbatov S.V., Rudy A.S., Naumov V.V., Mironenko A.A., Savenko O.V., Smirnova M.A., Mazaletsky L.A., Pukhov D.E.
Al Islands on Si(111): Growth Temperature, Morphology and Strain
Lomov A.A., Zakharov D.M., Tarasov M.A., Chekushkin A.M., Tatarintsev A.A., Vasiliev A.L.
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