Effect of prolonged annealing on the morphology and optical properties of ZnO films produced by magnetron sputtering

Мұқаба

Дәйексөз келтіру

Толық мәтін

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Аннотация

The effect of annealing time on the structural and optical properties of ZnO films, which are formed from Zn films obtained by magnetron sputtering followed by oxidation in air, is described. Thermal oxidation in air was carried out for 7 and 24 hours, respectively, in a programmable muffle furnace at T = 750°C. A change in the structure of the film surface depending on the annealing time of the Zn film and the substrate material was found, which manifests itself in the optical properties of the films.

Авторлар туралы

V. Tomaev

St. Petersburg State Institute of Technology; St. Petersburg Mining University

Хат алмасуға жауапты Автор.
Email: tvaza@mail.ru
Russia, 190013, St. Petersburg; Russia, 199106, St. Petersburg

V. Polishchuk

Admiral Makarov State University of Maritime and Inland Shiping

Email: tvaza@mail.ru
Russia, 198035, Saint-Petersburg

N. Leonov

National Research University ITMO

Email: tvaza@mail.ru
Russia, 197101, St. Petersburg

T. Vartanyan

National Research University ITMO

Email: tvaza@mail.ru
Russia, 197101, St. Petersburg

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© В.В. Томаев, В.А. Полищук, Н.Б. Леонов, Т.А. Вартанян, 2023