Study of Reflectivity and Microstructure of Mo/Be Multilayer Mirrors

G. D. Antysheva; Антышева Г. Д.; N. Kumar; Кумар Н.; R. S. Pleshkov; Плешков Р. С.; P. A. Yunin; Юнин П. А.; V. N. Polkovnikov; Полковников В. Н.; N. I. Chkhalo; Чхало Н. И.

doi:10.31857/S1028096023120026

Study of Reflectivity and Microstructure of Mo/Be Multilayer Mirrors

Autores: Antysheva G.D.¹^,2, Kumar N.¹, Pleshkov R.S.¹, Yunin P.A.¹^,2, Polkovnikov V.N.¹, Chkhalo N.I.¹
Afiliações:
1. Institute for Physics of Microstructures RAS
2. Lobachevsky State University of Nizhny Novgorod
Edição: Nº 12 (2023)
Páginas: 3-6
Seção: Articles
URL: https://rjeid.com/1028-0960/article/view/664694
DOI: https://doi.org/10.31857/S1028096023120026
EDN: https://elibrary.ru/AXEXHB
ID: 664694

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Resumo

The reflection coefficient and microstructure of Mo/Be multilayer mirrors were studied as functions of Γ, the ratio of the Mo layer thickness to the period d_p. The thickness and period of the layers were studied using X‑ray diffraction (wavelength 0.154 nm). Clearly defined high-intensity Bragg reflection peaks indicate good reproducibility of layer thicknesses over the depth of the multilayer structure and high quality of interfaces. The reflectivity of the mirror at a wavelength of 11.4 nm was maximum 62% at Γ = 0.42. It sharply decreased at higher and lower values of Γ. Both Mo and Be layers at Γ = 0.42 were polycrystals, which were studied using X-ray diffraction and Raman spectroscopy, respectively. It was also found that the sizes of crystallites almost coincided with the thicknesses of the Be and Mo layers in the period.

Palavras-chave

microstructure, Mo/Be multilayer film, reflection coefficient, interface.

Bibliografia

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